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目前在工业上广泛采用的CVD技术制备硅膜，工艺和设备复杂，成本高，且在安全和环保环节上投入巨大。我们在国内首创出了微晶硅薄膜的PVD法沉积工艺，在温度低于300度的条件下，在单晶硅片和普通玻璃片上制备出不同结晶度的微晶硅薄膜和纳米结构硅薄膜，可以得到具有高度<111>方向取向生长的微晶硅薄膜，并实现了控制工艺的稳定性和可重复性。利用磁控溅射技术成功实现微晶硅薄膜的制备是一项重大突破，从根本上克服了现有技术的缺点，具有绿色、高效、简单等优点。目前需要合作伙伴，把该实验室技术放大到工业规模。
二、应用范围：
硅基薄膜材料在现代半导体工业中有着广泛的应用，例如在液晶显示器、微电子器件、电脑存储元件以及太阳电池等领域，硅基薄膜材料都发挥着至关重要的作用。尤其在被人们称为“绿色”能源的太阳电池领域，硅基薄膜材料有着无可限量的应用前景，基于微晶硅薄膜材料为基础的新一代硅基太阳电池是现今全世界的研究热点，被人们寄予了厚望。
三、生产条件： 属于真空镀膜技术的一种。
四、成本估算：
与普通磁控溅射想比，增加了等离子体源，提高了溅射离化率，增加设备成本约10%，每台设备价值在150万左右。但是相对于CVD技术而言，由于无需处理废气和安全保护，设备和运行成本大大下降。
五、规模与投资：
需要与合作方协商决定。
六、提供技术的程度和合作方式：
我们提供设备制造技术和相关制造工艺，同时我们拥有先进的材料表征手段，可提供材料结构和性能数据。
合作方提出进行设备放大并实施批量生产。
七、市场与效益：
太阳能薄膜电池的传统制造过程中会产生大量污染及耗费大量能源。
本项目提供的技术属于国内独有的前沿技术，是太阳能薄膜电池生产所最求的新一代技术，具有重大应用价值，尤其在强调绿色制造的今天。
为维护中技网平台交易秩序，保护技术需求方合法权益，本人（本单位）特做出以下承诺和声明：
一、本人（本单位）专利技术是经国家知识产权局审定认可，并取得了该项知识产权的专利证书，信息真实，技术可靠，无知识产权纠纷。
二、本人（本单位）愿意根据《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权保护法》和《中华人民共和国促进科技成果转化法》以及中技网平台制定的技术转移交易规则和制度进行规范交易，自觉维护技术转移网络交易秩序。
三、如本人（本单位）在技术转移转化过程中有严重违规违约行为，给平台和交易相对方造成经济或财产损失，本人（本单位）愿意承担相应责任。
For maintenance or web platform trading order, protect the legal rights of the technical demand (units), make the following commitment and declaration:
1、I (unit) patent technology is approved by the state intellectual property office and obtained the patent certificate of this intellectual property, the information is true, the technology is reliable, and there is no intellectual property dispute.
2, I (unit) willing to according to the law of the People's Republic of China contract law ", "patent law of the People's Republic of China, the intellectual property rights of the People's Republic of China protects a law" and "promote the conversion of scientific and technological achievements of the People's Republic of China" and wowed net platform to develop the trading rules and the system of technology transfer of regulate transactions, consciously safeguard the order of the technology transfer network transactions.
3.If I (unit) in the process of the transformation of technology transfer has seriously violated the breach, to economic or property damage caused by platform and trade each other, I (the unit) are willing to bear the corresponding legal responsibility.
1、转让方在委托服务商转让期间，首先要认真阅读中技网会员协议和技术商品交易规则，其次要了解中技网有关收费标准，清楚应当遵守的相关权利和义务。
2、购买方在中技网平台上认定购买某一项技术商品前，需要按照规定向中技网平台支付定金（完成意向性购买），但知识产权归属以及何时能够使用该项知识产权，视买卖双方协商确定后才能够使用，在此之前，建议您不要使用或侵犯他人的知识产权。
3、本网站对上传在首页各版块展示出售的技术产品实行有偿服务原则，对拟出售的专利技术产品交易价格以及市场前景，中技网将根据财政部无形资产评估有关标准和规定给予客观、公正的评价，具体收费标准请咨询客服人员。
1, the assignor in commissioned services during the transfer, the first thing to read or member agreement and the technical commodity trading rules, second to understand relevant charge standard or network platform, which shall comply with the relevant rights and obligations.
2, the purchaser on or network platform, decided to buy a certain technology products before, need to pay a deposit in accordance with the relevant provisions to or net platform (complete intentional purchase), but the intellectual property ownership and when to be able to use the intellectual property rights, after the negotiation between the buyers and sellers can use, before that, it is recommended that you do not use or infringe others' intellectual property.
3, this website to upload on the home page of each section shows the sale of products shall be paid for the service principle, to plans to sell the patent technology of the product market price and the market prospects, or network will according to the ministry of finance of intangible assets evaluation of relevant standards and regulations to give an objective and fair evaluation, specific charge standard, please consult customer service staff.
根据中技网交易规则，技术买卖双方应当遵循友好、自愿和有偿原则进行交易，为此，请技术买卖双方应当遵循中技网制定的交易流程进行有序买卖。
一、买方确定购买意向→支付定金→签订意向性购买协议→买卖双方签订正式协议→买方付款 →办理技术转移交割手续→资金结算→交易完成→退还定金。
二、卖方提交信息资料→上传有效证明文件→平台审核→与平台签订相关协议和信用保证金协议→缴纳信用保证金→平台发布出让信息→确定买家→签订协议→出让技术→资金结算→交易完成→退还信用保证金。
According to trading rules or network technology between buyer and seller shall follow the principle of friendly, voluntary and paid, for this, please technology between buyer and seller shall follow the wowed the orderly sale network of trading process.
One, the buyer to determine the purchase intentions to pay the deposit, intentional purchase agreement to sign a formal agreement between the seller and the buyer, the buyer's payment to delivery technology transfer formalities, fund settlement - deal - return deposit.
Second, the seller submit information to upload valid documents to review platform, and platform signed the relevant agreement and credit margin agreements to pay credit deposit, platform release transfer information to determine the buyer, signed an agreement to transfer technology, funds and settlements - deal - the refund credit deposit
1、技术转让方请务必遵守《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权法》、《中华人民共和国促进科技成果转化法》等相关法律法规，诚实守信，不得伪造或提供虚假技术信息。
2、技术购买方在决定购买技术商品前，首先要了解中技网的有关交易流程和技术转让方的详细信息，在购买过程中对有关技术信息产生疑问或不清楚的地方，请随时与技术信息发布单位取得联系。
3、中技网作为市场化运作的专业技术买卖服务平台，由中国技术市场协会主办，是国内权威的专业技术交易分类信息网，专业、专注、权威，面向国内外发布技术转让和技术需求项目信息，服务周到，信誉第一，交易规范，请客户认准中技网官方网址，切勿上当受骗。
1, technology transferor please be sure to abide by the law of the People's Republic of China contract law ", "patent law of the People's Republic of China" and "intellectual property law of the People's Republic of China", "promote the conversion of scientific and technological achievements of the People's Republic of China" and other relevant laws and regulations, the honest code of honor, are not allowed to fake or providing false information technology.
2 the purchaser prior to the decision to buy technology goods, technology, the first thing to understand the assignor or network related transaction process and technology of detailed information, in the process of buying to doubt the related technical information or unclear, please feel free to get in touch with technical information release unit.
3, or as a market-oriented operation of professional technology trading service platform, sponsored by the China technology market association, is the domestic authority of professional technology trading classified information network, professional, dedicated, authority, and the release technology transfer and technology at home and abroad demand project information, service, credit first, trade specification, please customers look or net official web site, please do not be deceived.
会员在服务期内私自线下与相对交易方进行交易，由当事人自行承担法律后果，所产生的经济或知识产权纠纷中技网不承担任何法律责任。
Membership in the service period to offline, transacting business with relatively by the parties to bear the legal consequences, economic or intellectual property rights disputes or generated by the network does not assume any legal liability.
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