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数字微纳加工设备是通过数字化控制空间光调制器实现像素级光场自由操控,利用 高数值孔径投影物镜生成高分辨力图形,结合高速扫描工件台同步运动,实现大面积、高分辨力,任意 微纳图形结构加工。设备包括高均匀性照明系统、空间光调制器、高数值孔径物镜、检焦系统、精密扫 描工件台以及高速并行控制系统等多部分组成。系统工作过程中,照明系统匀化准直后的光,照射到空 间光调制器上,通过空间光调制器对光场进行像素化调制,使其形成各种不同图形分布,然后通过高数 值孔径物镜成像到基片表面。扫描过程中,检焦系统对基片表面进行实时检测,并结合工件台多自由度 同步运动,与掩模图形精密控制,实现快速、高分辨、大面积微纳图形加工。
【技术指标】
开发应用于大面积三维数字微纳结构加工的数字微细加工设备,包含表面三维微纳 光刻、三维微立体增材制造两种系列产品,具体技术指标如下:
(1)表面三维微纳光刻设备 横向加工分辨力:1μm; 纵向加工分辨力:1μm; 工件台运动速度:10mm/s; 横向加工面积:1-4 英寸; 纵向加工高度:10μm; 缩小倍率:7.6 倍; 焦面检测精度:1μm。
(2)三维微立体增材制造设备 横向加工分辨力:25μm; 纵向加工分辨力:100μm; 横向加工面积:1 英寸; 纵向加工高度:10mm; 放大倍率:2 倍。
【技术特点】
系统工作过程中,照明系统匀化准直后的光,照射到空间光调制器上,通过空间光 调制器对光场进行像素化调制,使其形成各种不同图形分布,然后通过高数值孔径物镜成像到基片表面。 扫描过程中,检焦系统对基片表面进行实时检测,并结合工件台多自由度同步运动,与掩模图形精密控制, 实现快速、高分辨、大面积微纳图形加工。
【先进程度】国内领先
【技术状态】小批量生产、工程应用阶段
【适用范围】
表面三维微纳光刻设备具备横向、纵向分辨力高、加工面积大的特点,主要应用于 大面积表面三维微纳结构制造,具体可应用于微透镜阵列、大面积光栅、防伪微结构以及仿生复眼结构 等的制作。
三维微立体增材制造设备具备纵向加工高度大、能够制作包括中空结构在内的任意三维结构, 主要应用于精度要求相对较低(数十微米)的立体三维微结构制造,具体可应用于牙模及其他生物组织、 光束整形器件等的制作。
【专利状态】申请专利36 项,授权17 项。
【合作方式】
(1)投资需求。寻求投资扩大产能,年产量在30 台~ 60 台,资金需求3000 万元,实施周期24 个月。
(2)合作研发。与PCB 印刷电路、传感器、液晶、LED 等上下游厂商及控股股东展开合作,共同 开展系统研发或承接数字微纳加工专用设备研发。
(3)技术服务。与各省市高新区、西部省区合作建设,在“中国制造2025”城市试点示范工作中 成为智能制造试点示范工程。
【预期效益
】随着微纳器件广泛应用,对加工的效率、灵活性等提出了更高的要求。本设备通过 构建数字化微纳加工系统,在无需掩模的情况下,实现任意结构、大面积高精度微纳结构加工,将极大 的促进我国微纳加工行业的发展。该设备能够完成目前市面绝大多数微纳结构加工,具有广泛的应用前景, 根据前期客户需求,年需求量在30 台以上,直接销售额上千万元,将带来巨大的经济效益。

为维护中技网平台交易秩序,保护技术需求方合法权益,本人(本单位)特做出以下承诺和声明:
一、本人(本单位)专利技术是经国家知识产权局审定认可,并取得了该项知识产权的专利证书,信息真实,技术可靠,无知识产权纠纷。
二、本人(本单位)愿意根据《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权保护法》和《中华人民共和国促进科技成果转化法》以及中技网平台制定的技术转移交易规则和制度进行规范交易,自觉维护技术转移网络交易秩序。
三、如本人(本单位)在技术转移转化过程中有严重违规违约行为,给平台和交易相对方造成经济或财产损失,本人(本单位)愿意承担相应责任。

For maintenance or web platform trading order, protect the legal rights of the technical demand (units), make the following commitment and declaration:

1I (unit) patent technology is approved by the state intellectual property office and obtained the patent certificate of this intellectual property, the information is true, the technology is reliable, and there is no intellectual property dispute.

2, I (unit) willing to according to the law of the People's Republic of China contract law ", "patent law of the People's Republic of China, the intellectual property rights of the People's Republic of China protects a law" and "promote the conversion of scientific and technological achievements of the People's Republic of China" and wowed net platform to develop the trading rules and the system of technology transfer of regulate transactions, consciously safeguard the order of the technology transfer network transactions.

3.If I (unit) in the process of the transformation of technology transfer has seriously violated the breach, to economic or property damage caused by platform and trade each other, I (the unit) are willing to bear the corresponding legal responsibility.

交易规则说明

1、转让方在委托服务商转让期间,首先要认真阅读中技网会员协议和技术商品交易规则,其次要了解中技网有关收费标准,清楚应当遵守的相关权利和义务

2、购买方在中技网平台上认定购买某一项技术商品前,需要按照规定向中技网平台支付定金(完成意向性购买),但知识产权归属以及何时能够使用该项知识产权,视买卖双方协商确定后才能够使用,在此之前,建议您不要使用或侵犯他人的知识产权。

3、本网站对上传在首页各版块展示出售的技术产品实行有偿服务原则,对拟出售的专利技术产品交易价格以及市场前景,中技网将根据财政部无形资产评估有关标准和规定给予客观、公正的评价,具体收费标准请咨询客服人员。

1, the assignor in commissioned services during the transfer, the first thing to read or member agreement and the technical commodity trading rules, second to understand relevant charge standard or network platform, which shall comply with the relevant rights and obligations.

2, the purchaser on or network platform, decided to buy a certain technology products before, need to pay a deposit in accordance with the relevant provisions to or net platform (complete intentional purchase), but the intellectual property ownership and when to be able to use the intellectual property rights, after the negotiation between the buyers and sellers can use, before that, it is recommended that you do not use or infringe others' intellectual property.

3, this website to upload on the home page of each section shows the sale of products shall be paid for the service principle, to plans to sell the patent technology of the product market price and the market prospects, or network will according to the ministry of finance of intangible assets evaluation of relevant standards and regulations to give an objective and fair evaluation, specific charge standard, please consult customer service staff.

交易流程

根据中技网交易规则,技术买卖双方应当遵循友好、自愿和有偿原则进行交易,为此,请技术买卖双方应当遵循中技网制定的交易流程进行有序买卖。
一、买方确定购买意向→支付定金→签订意向性购买协议→买卖双方签订正式协议→买方付款 →办理技术转移交割手续→资金结算→交易完成→退还定金。

二、卖方提交信息资料→上传有效证明文件→平台审核→与平台签订相关协议和信用保证金协议→缴纳信用保证金→平台发布出让信息→确定买家→签订协议→出让技术→资金结算→交易完成→退还信用保证金。

    According to trading rules or network technology between buyer and seller shall follow the principle of friendly, voluntary and paid, for this, please technology between buyer and seller shall follow the wowed the orderly sale network of trading process.

One, the buyer to determine the purchase intentions to pay the deposit, intentional purchase agreement to sign a formal agreement between the seller and the buyer, the buyer's payment to delivery technology transfer formalities, fund settlement - deal - return deposit.

Second, the seller submit information to upload valid documents to review platform, and platform signed the relevant agreement and credit margin agreements to pay credit deposit, platform release transfer information to determine the buyer, signed an agreement to transfer technology, funds and settlements - deal - the refund credit deposit

重要提示

1、技术转让方请务必遵守《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权法》、《中华人民共和国促进科技成果转化法》等相关法律法规,诚实守信,不得伪造或提供虚假技术信息。

2、技术购买方在决定购买技术商品前,首先要了解中技网的有关交易流程和技术转让方的详细信息,在购买过程中对有关技术信息产生疑问或不清楚的地方,请随时与技术信息发布单位取得联系。

3、中技网作为市场化运作的专业技术买卖服务平台,由中国技术市场协会主办,是国内权威的专业技术交易分类信息网,专业、专注、权威,面向国内外发布技术转让和技术需求项目信息,服务周到,信誉第一,交易规范,请客户认准中技网官方网址,切勿上当受骗。

1, technology transferor please be sure to abide by the law of the People's Republic of China contract law ", "patent law of the People's Republic of China" and "intellectual property law of the People's Republic of China", "promote the conversion of scientific and technological achievements of the People's Republic of China" and other relevant laws and regulations, the honest code of honor, are not allowed to fake or providing false information technology.

2 the purchaser prior to the decision to buy technology goods, technology, the first thing to understand the assignor or network related transaction process and technology of detailed information, in the process of buying to doubt the related technical information or unclear, please feel free to get in touch with technical information release unit.

3, or as a market-oriented operation of professional technology trading service platform, sponsored by the China technology market association, is the domestic authority of professional technology trading classified information network, professional, dedicated, authority, and the release technology transfer and technology at home and abroad demand project information, service, credit first, trade specification, please customers look or net official web site, please do not be deceived.

郑重声明

  会员在服务期内私自线下与相对交易方进行交易,由当事人自行承担法律后果,所产生的经济或知识产权纠纷中技网不承担任何法律责任。

Membership in the service period to offline, transacting business with relatively by the parties to bear the legal consequences, economic or intellectual property rights disputes or generated by the network does not assume any legal liability.

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