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硅片直接键合(Silicon Wafer Direct Bonding, 缩写为 SDB)是指二片镜面抛光硅片 经过适当表面清洗与处理,可以在室温下直接键合,再经加热增加其键合强度而成为一 个整体。键合前,硅片表面不需任何粘结剂,键合过程中,也不需在硅片表面施加外力。
SDB 技术的特征在于它与半导体及集成电路加工技术的兼容性和自身的灵活性。VLSI 的发展使硅片表面更为光滑、平整与洁净,这种发展与 SDB 对硅片本身的要求完全一 致;SDB 的灵活性表现在可以实现不同晶向、不同掺杂类型、不同杂质浓度、不同硅片 厚度和带有 SiO2 的键合。SDB 技术使硅材料和 VLSI 技术的潜力得到了充分地发挥。
项目发明了等离子体表面处理技术和化学表面处理技术,实现了硅/硅、硅/二氧化 硅、二氧化硅/二氧化硅的硅片直接键合;提出了键合界面气体横向扩散的空洞消除机 制;提出并优化了两步键合技术。
键合结果表明:键合面积>95%,键合强度大于体硅 强度。针对电力电子器件的衬底材料、绝缘体上硅(SOI)材料、微传感器等制备需要, 提出并实现了快速热键合技术,结果使键合界面杂质互扩散很少;提出并实现了掺 TCE 二氧化硅作为埋层的 SOI 键合技术,结果使键合界面电荷与一般 MOS 器件接近。发明 了耗尽层边缘作为腐蚀停止界面的减薄技术,实现了小尺寸键合 SOI 硅片的减薄。针对 硅片直接键合技术的批量工业应用,广泛开展了界面杂质扩散、界面电荷、界面空洞、 界面应力的表征和测试技术研究。

为维护中技网平台交易秩序,保护技术需求方合法权益,本人(本单位)特做出以下承诺和声明:
一、本人(本单位)专利技术是经国家知识产权局审定认可,并取得了该项知识产权的专利证书,信息真实,技术可靠,无知识产权纠纷。
二、本人(本单位)愿意根据《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权保护法》和《中华人民共和国促进科技成果转化法》以及中技网平台制定的技术转移交易规则和制度进行规范交易,自觉维护技术转移网络交易秩序。
三、如本人(本单位)在技术转移转化过程中有严重违规违约行为,给平台和交易相对方造成经济或财产损失,本人(本单位)愿意承担相应责任。

For maintenance or web platform trading order, protect the legal rights of the technical demand (units), make the following commitment and declaration:

1I (unit) patent technology is approved by the state intellectual property office and obtained the patent certificate of this intellectual property, the information is true, the technology is reliable, and there is no intellectual property dispute.

2, I (unit) willing to according to the law of the People's Republic of China contract law ", "patent law of the People's Republic of China, the intellectual property rights of the People's Republic of China protects a law" and "promote the conversion of scientific and technological achievements of the People's Republic of China" and wowed net platform to develop the trading rules and the system of technology transfer of regulate transactions, consciously safeguard the order of the technology transfer network transactions.

3.If I (unit) in the process of the transformation of technology transfer has seriously violated the breach, to economic or property damage caused by platform and trade each other, I (the unit) are willing to bear the corresponding legal responsibility.

交易规则说明

1、转让方在委托服务商转让期间,首先要认真阅读中技网会员协议和技术商品交易规则,其次要了解中技网有关收费标准,清楚应当遵守的相关权利和义务

2、购买方在中技网平台上认定购买某一项技术商品前,需要按照规定向中技网平台支付定金(完成意向性购买),但知识产权归属以及何时能够使用该项知识产权,视买卖双方协商确定后才能够使用,在此之前,建议您不要使用或侵犯他人的知识产权。

3、本网站对上传在首页各版块展示出售的技术产品实行有偿服务原则,对拟出售的专利技术产品交易价格以及市场前景,中技网将根据财政部无形资产评估有关标准和规定给予客观、公正的评价,具体收费标准请咨询客服人员。

1, the assignor in commissioned services during the transfer, the first thing to read or member agreement and the technical commodity trading rules, second to understand relevant charge standard or network platform, which shall comply with the relevant rights and obligations.

2, the purchaser on or network platform, decided to buy a certain technology products before, need to pay a deposit in accordance with the relevant provisions to or net platform (complete intentional purchase), but the intellectual property ownership and when to be able to use the intellectual property rights, after the negotiation between the buyers and sellers can use, before that, it is recommended that you do not use or infringe others' intellectual property.

3, this website to upload on the home page of each section shows the sale of products shall be paid for the service principle, to plans to sell the patent technology of the product market price and the market prospects, or network will according to the ministry of finance of intangible assets evaluation of relevant standards and regulations to give an objective and fair evaluation, specific charge standard, please consult customer service staff.

交易流程

根据中技网交易规则,技术买卖双方应当遵循友好、自愿和有偿原则进行交易,为此,请技术买卖双方应当遵循中技网制定的交易流程进行有序买卖。
一、买方确定购买意向→支付定金→签订意向性购买协议→买卖双方签订正式协议→买方付款 →办理技术转移交割手续→资金结算→交易完成→退还定金。

二、卖方提交信息资料→上传有效证明文件→平台审核→与平台签订相关协议和信用保证金协议→缴纳信用保证金→平台发布出让信息→确定买家→签订协议→出让技术→资金结算→交易完成→退还信用保证金。

    According to trading rules or network technology between buyer and seller shall follow the principle of friendly, voluntary and paid, for this, please technology between buyer and seller shall follow the wowed the orderly sale network of trading process.

One, the buyer to determine the purchase intentions to pay the deposit, intentional purchase agreement to sign a formal agreement between the seller and the buyer, the buyer's payment to delivery technology transfer formalities, fund settlement - deal - return deposit.

Second, the seller submit information to upload valid documents to review platform, and platform signed the relevant agreement and credit margin agreements to pay credit deposit, platform release transfer information to determine the buyer, signed an agreement to transfer technology, funds and settlements - deal - the refund credit deposit

重要提示

1、技术转让方请务必遵守《中华人民共和国合同法》、《中华人民共和国专利法》、《中华人民共和国知识产权法》、《中华人民共和国促进科技成果转化法》等相关法律法规,诚实守信,不得伪造或提供虚假技术信息。

2、技术购买方在决定购买技术商品前,首先要了解中技网的有关交易流程和技术转让方的详细信息,在购买过程中对有关技术信息产生疑问或不清楚的地方,请随时与技术信息发布单位取得联系。

3、中技网作为市场化运作的专业技术买卖服务平台,由中国技术市场协会主办,是国内权威的专业技术交易分类信息网,专业、专注、权威,面向国内外发布技术转让和技术需求项目信息,服务周到,信誉第一,交易规范,请客户认准中技网官方网址,切勿上当受骗。

1, technology transferor please be sure to abide by the law of the People's Republic of China contract law ", "patent law of the People's Republic of China" and "intellectual property law of the People's Republic of China", "promote the conversion of scientific and technological achievements of the People's Republic of China" and other relevant laws and regulations, the honest code of honor, are not allowed to fake or providing false information technology.

2 the purchaser prior to the decision to buy technology goods, technology, the first thing to understand the assignor or network related transaction process and technology of detailed information, in the process of buying to doubt the related technical information or unclear, please feel free to get in touch with technical information release unit.

3, or as a market-oriented operation of professional technology trading service platform, sponsored by the China technology market association, is the domestic authority of professional technology trading classified information network, professional, dedicated, authority, and the release technology transfer and technology at home and abroad demand project information, service, credit first, trade specification, please customers look or net official web site, please do not be deceived.

郑重声明

  会员在服务期内私自线下与相对交易方进行交易,由当事人自行承担法律后果,所产生的经济或知识产权纠纷中技网不承担任何法律责任。

Membership in the service period to offline, transacting business with relatively by the parties to bear the legal consequences, economic or intellectual property rights disputes or generated by the network does not assume any legal liability.

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